"microlithography" meaning in English

{
  "etymology_templates": [
    {
      "args": {
        "1": "en",
        "2": "micro",
        "3": "lithography"
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      "expansion": "micro- + lithography",
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  ],
  "etymology_text": "micro- + lithography",
  "head_templates": [
    {
      "args": {
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      "expansion": "microlithography (uncountable)",
      "name": "en-noun"
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  "lang": "English",
  "lang_code": "en",
  "pos": "noun",
  "senses": [
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        {
          "kind": "other",
          "name": "English entries with incorrect language header",
          "parents": [
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          "source": "w"
        },
        {
          "kind": "other",
          "name": "English terms prefixed with micro-",
          "parents": [],
          "source": "w"
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      ],
      "glosses": [
        "Any of several techniques for the production of microscale devices; especially the production of semiconductor devices using beams of photons or electrons."
      ],
      "id": "en-microlithography-en-noun-HI~FhkkJ",
      "links": [
        [
          "microscale",
          "microscale"
        ],
        [
          "semiconductor",
          "semiconductor"
        ],
        [
          "photon",
          "photon"
        ],
        [
          "electron",
          "electron"
        ]
      ],
      "tags": [
        "uncountable"
      ]
    }
  ],
  "sounds": [
    {
      "rhymes": "-ɒɡɹəfi"
    }
  ],
  "word": "microlithography"
}

{
  "etymology_templates": [
    {
      "args": {
        "1": "en",
        "2": "micro",
        "3": "lithography"
      },
      "expansion": "micro- + lithography",
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    }
  ],
  "etymology_text": "micro- + lithography",
  "head_templates": [
    {
      "args": {
        "1": "-"
      },
      "expansion": "microlithography (uncountable)",
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  ],
  "lang": "English",
  "lang_code": "en",
  "pos": "noun",
  "senses": [
    {
      "categories": [
        "English entries with incorrect language header",
        "English lemmas",
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        "Rhymes:English/ɒɡɹəfi",
        "Rhymes:English/ɒɡɹəfi/6 syllables"
      ],
      "glosses": [
        "Any of several techniques for the production of microscale devices; especially the production of semiconductor devices using beams of photons or electrons."
      ],
      "links": [
        [
          "microscale",
          "microscale"
        ],
        [
          "semiconductor",
          "semiconductor"
        ],
        [
          "photon",
          "photon"
        ],
        [
          "electron",
          "electron"
        ]
      ],
      "tags": [
        "uncountable"
      ]
    }
  ],
  "sounds": [
    {
      "rhymes": "-ɒɡɹəfi"
    }
  ],
  "word": "microlithography"
}