"microlithography" meaning in English

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  "etymology_text": "Etymology tree\nProto-Indo-European *mey-der.?\nAncient Greek μικρός (mikrós)der.\nEnglish micro-\nEnglish lithography\nEnglish microlithography\nFrom micro- + lithography.",
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  "pos": "noun",
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      "glosses": [
        "Any of several techniques for the production of microscale devices; especially the production of semiconductor devices using beams of photons or electrons."
      ],
      "id": "en-microlithography-en-noun-HI~FhkkJ",
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          "microscale",
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          "electron",
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    {
      "rhymes": "-ɒɡɹəfi"
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  "word": "microlithography"
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  "etymology_text": "Etymology tree\nProto-Indo-European *mey-der.?\nAncient Greek μικρός (mikrós)der.\nEnglish micro-\nEnglish lithography\nEnglish microlithography\nFrom micro- + lithography.",
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        "Rhymes:English/ɒɡɹəfi",
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  "word": "microlithography"
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