"光刻機" meaning in Chinese

{
  "forms": [
    {
      "form": "光刻机",
      "raw_tags": [
        "Simplified Chinese"
      ]
    }
  ],
  "head_templates": [
    {
      "args": {
        "1": "zh",
        "2": "noun"
      },
      "expansion": "光刻機",
      "name": "head"
    }
  ],
  "lang": "Chinese",
  "lang_code": "zh",
  "pos": "noun",
  "senses": [
    {
      "categories": [
        {
          "kind": "other",
          "name": "Chinese entries with incorrect language header",
          "parents": [
            "Entries with incorrect language header",
            "Entry maintenance"
          ],
          "source": "w"
        },
        {
          "kind": "other",
          "name": "Pages with 1 entry",
          "parents": [],
          "source": "w"
        },
        {
          "kind": "other",
          "name": "Pages with entries",
          "parents": [],
          "source": "w"
        },
        {
          "kind": "topical",
          "langcode": "zh",
          "name": "Electronics",
          "orig": "zh:Electronics",
          "parents": [
            "Technology",
            "All topics",
            "Fundamental"
          ],
          "source": "w"
        }
      ],
      "glosses": [
        "aligner; stepper; photolithography machine (system used in semiconductor manufacturing)"
      ],
      "id": "en-光刻機-zh-noun-5NtY9SMa",
      "links": [
        [
          "aligner",
          "aligner"
        ],
        [
          "stepper",
          "stepper"
        ],
        [
          "photolithography",
          "photolithography"
        ],
        [
          "machine",
          "machine"
        ]
      ]
    }
  ],
  "sounds": [
    {
      "tags": [
        "Mandarin",
        "Pinyin"
      ],
      "zh-pron": "guāngkèjī"
    },
    {
      "tags": [
        "Mandarin",
        "bopomofo"
      ],
      "zh-pron": "ㄍㄨㄤ ㄎㄜˋ ㄐㄧ"
    },
    {
      "tags": [
        "Hanyu-Pinyin",
        "Mandarin"
      ],
      "zh-pron": "guāngkèjī"
    },
    {
      "tags": [
        "Mandarin",
        "Tongyong-Pinyin"
      ],
      "zh-pron": "guangkèji"
    },
    {
      "tags": [
        "Mandarin",
        "Wade-Giles"
      ],
      "zh-pron": "kuang¹-kʻo⁴-chi¹"
    },
    {
      "tags": [
        "Mandarin",
        "Yale"
      ],
      "zh-pron": "gwāng-kè-jī"
    },
    {
      "tags": [
        "Gwoyeu-Romatsyh",
        "Mandarin"
      ],
      "zh-pron": "guangkehji"
    },
    {
      "tags": [
        "Mandarin",
        "Palladius"
      ],
      "zh-pron": "гуанкэцзи"
    },
    {
      "tags": [
        "Mandarin",
        "Palladius"
      ],
      "zh-pron": "guankɛczi"
    },
    {
      "ipa": "/ku̯ɑŋ⁵⁵ kʰɤ⁵¹ t͡ɕi⁵⁵/",
      "tags": [
        "Mandarin",
        "Sinological-IPA"
      ]
    },
    {
      "ipa": "/ku̯ɑŋ⁵⁵ kʰɤ⁵¹ t͡ɕi⁵⁵/"
    }
  ],
  "word": "光刻機"
}

{
  "forms": [
    {
      "form": "光刻机",
      "raw_tags": [
        "Simplified Chinese"
      ]
    }
  ],
  "head_templates": [
    {
      "args": {
        "1": "zh",
        "2": "noun"
      },
      "expansion": "光刻機",
      "name": "head"
    }
  ],
  "lang": "Chinese",
  "lang_code": "zh",
  "pos": "noun",
  "senses": [
    {
      "categories": [
        "Chinese entries with incorrect language header",
        "Chinese lemmas",
        "Chinese nouns",
        "Chinese terms spelled with 光",
        "Chinese terms spelled with 刻",
        "Chinese terms spelled with 機",
        "Chinese terms with IPA pronunciation",
        "Mandarin lemmas",
        "Mandarin nouns",
        "Pages with 1 entry",
        "Pages with entries",
        "zh:Electronics"
      ],
      "glosses": [
        "aligner; stepper; photolithography machine (system used in semiconductor manufacturing)"
      ],
      "links": [
        [
          "aligner",
          "aligner"
        ],
        [
          "stepper",
          "stepper"
        ],
        [
          "photolithography",
          "photolithography"
        ],
        [
          "machine",
          "machine"
        ]
      ]
    }
  ],
  "sounds": [
    {
      "tags": [
        "Mandarin",
        "Pinyin"
      ],
      "zh-pron": "guāngkèjī"
    },
    {
      "tags": [
        "Mandarin",
        "bopomofo"
      ],
      "zh-pron": "ㄍㄨㄤ ㄎㄜˋ ㄐㄧ"
    },
    {
      "tags": [
        "Hanyu-Pinyin",
        "Mandarin"
      ],
      "zh-pron": "guāngkèjī"
    },
    {
      "tags": [
        "Mandarin",
        "Tongyong-Pinyin"
      ],
      "zh-pron": "guangkèji"
    },
    {
      "tags": [
        "Mandarin",
        "Wade-Giles"
      ],
      "zh-pron": "kuang¹-kʻo⁴-chi¹"
    },
    {
      "tags": [
        "Mandarin",
        "Yale"
      ],
      "zh-pron": "gwāng-kè-jī"
    },
    {
      "tags": [
        "Gwoyeu-Romatsyh",
        "Mandarin"
      ],
      "zh-pron": "guangkehji"
    },
    {
      "tags": [
        "Mandarin",
        "Palladius"
      ],
      "zh-pron": "гуанкэцзи"
    },
    {
      "tags": [
        "Mandarin",
        "Palladius"
      ],
      "zh-pron": "guankɛczi"
    },
    {
      "ipa": "/ku̯ɑŋ⁵⁵ kʰɤ⁵¹ t͡ɕi⁵⁵/",
      "tags": [
        "Mandarin",
        "Sinological-IPA"
      ]
    },
    {
      "ipa": "/ku̯ɑŋ⁵⁵ kʰɤ⁵¹ t͡ɕi⁵⁵/"
    }
  ],
  "word": "光刻機"
}